Applications

SlurryScope can be used for multiple applications

Slurry blend preparation, including raw materials:

•Raw Slurry – Identify suspension issues (inhomogeneous mixing,solids distribution, settling in tote/drum)

•Batch Blending – Batch to batch LPC performance

•Local Circulation Loop – Verify LPC count during batch qualification

•Side Switching - Batch to batch LPC verification and trending

•Global Loop Supply – Verify LPC prior to VMB
Configuration for slurry blend analysis...
Graph of Ceria delivery over time...

Filtration LPC issues, operation and maintenance

•Filter – Detect element end of life and/or breakthrough

•Maintenance – Detect LPC excursions from filter shock Configuration for monitoring filter operation/maintenance...
Monitoring effects of filtration...

CMP POU slurry LPC to wafer CMP performance correlation

•Global Loop Return – Detect loop-generated LPC

•Point of Use – Correlate wafer-to-wafer CMP results with slurry LPC
Configuration to correlate LPC to wafer CMP results...